Metal Deposition - LPCVD and PECVD Nitride - Thermal Oxide (Wet and Dry)  -  Metal Deposition  -  Copper Electroplating  -  Thin Films

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C) Metal deposition

 Refractory Metals: Ta, TaN, Ti, TiN, TiW, W, WN, WSi, Cr and SiC Sputtering   

Thickness

2"~ 4"

5"/6"

8"

12"

200Å ~ 500Å

$8.60

$19.00

$22.00

$59.00

501Å ~ 1,500Å

$9.60

$21.00

$35.00

$63.00

1,501Å ~ 3,000Å

$10.60

$24.00

$41.00

$82.00

   Conductive Metals: Cu, Al, AlCu(1%), AlSi(1%) and AlSi(1%)Cu(1%) Sputtering    

Thickness

2"~ 4"

5"/6"

8"

12"

500 Å ~ 2,500 Å

$9.60

$21.00

$33.00

$65.00

2,501Å~ 8,000 Å

$10.60

$22.00

$35.00

$70.00

8,001 Å ~ 1.5um

$12.60

$25.00*

$39.90*

$86.00

Name
Organization
Email
Phone
Fax
Wafer
Diameter
Type  N       or        P
Orientation
Resistivity
Dopant
Thickness
Sides Polished  One-Side     Two-Side
Quantity
Other Requests
 
 
 

 

Precious Metals: Pt, Ru, Rh, Pd, Au, Ag, Ir & Ferromagnetic Metals: Co, Ni Deposition

 

Precious Metals

Ferromagnetic Metals

Wafer size

4"

6"

8"

4"

6"

8"

Batch size

28 wafers

15 wafers

9 wafers

28 wafers

15 wafers

9 wafers

200Å ~ 500Å

 $1,190/batch

 $900/batch

501Å ~ 1,500Å

$1,225/batch

$925/batch

1,501Å ~ 3,000Å

$1,350/batch

$950/batch

 

  •  Uniformity of the film: ±5% for Refractory and Conductive metals, and ± 10% for Precious and Ferromagnetic metal films within a wafer and within a batch.
  • Min. order: Refractory/Conductive metals  – 25 wafers for all the wafer sizes.
    •      Precious/Ferromagnetic metals – one batch
  • If order is less than minimum quantity, please contact us for special arrangement. We also have some amount of inventory wafers.
  • Precious metals usually require adhesion layer. Above prices include a cost for adhesion layer. Please contact us more in details about adhesion layer.
  • Multiple metal film discount: 50% discount will be applied when multiple metal films are ordered on the same wafer. The highest valued film will be fully priced as listed above.
  • Thickness with * mark is applicable to Copper only.
  • Turnaround time: 2 weeks or shorter.
  • Shipping charge: Prices quoted do not include shipping charge.
  • Volume Discount: Following volume discount is applied on most of above films for the order with the same wafer size delivered within 2 days. Please ask us for details.    

Quantity /order

Discount Rate

4 " 8" wafer

12" wafers

 

100  199 wafers

50 99 wafers

5 % of above price

200  399 wafers

100 199 wafers

10 % of above price

400  599 wafers

200 299 wafers

15 % of above price

600 wafer 

300 wafer

Please call us